2.45 GHz / 6 kW Solid-State RF for PECVD
Altheray developed a solid-state architecture concept around a live 2.45 GHz, 6 kW PECVD microwave-power requirement, evaluating complete generator and multi-module routes.
Case study
Scope
- 2.45 GHz operating point
- 6 kW target power
- Pulsed operation
- Combining, cooling and supplier qualification
Need this capability?
Bring the application, constraints and target outcome. Altheray can qualify a production or development route.